|
Nhan đề
| Effect of slurry injection position on material removal in chemical mechanical planarization / Tongqing Wang and others |
|
Mô tả vật lý
| From p.888-893 |
|
Từ khóa tự do
| Chemical mechanical planarization |
|
Từ khóa tự do
| Slurry injection position |
|
Tác giả(bs) CN
| Dewen Zhao |
|
Tác giả(bs) CN
| Tongqing Wang |
|
Tác giả(bs) CN
| Xinchun Lu |
|
Tác giả(bs) CN
| Yongyong He |
|
Nguồn trích
| The international journal of advanced manufacturing technology-
Số: 9-12
Tập: 67
Năm: 2013 |
|
|
000
| 00000nab#a2200000ui#4500 |
|---|
| 001 | 195606 |
|---|
| 002 | 21 |
|---|
| 004 | FD0B37E6-5662-4431-A4CB-E50BE29FC3CA |
|---|
| 005 | 202401121953 |
|---|
| 008 | 081223s vm| vie |
|---|
| 009 | 1 0 |
|---|
| 039 | |y20240112195333|zluuyen |
|---|
| 245 | |aEffect of slurry injection position on material removal in chemical mechanical planarization / |cTongqing Wang and others |
|---|
| 300 | |aFrom p.888-893 |
|---|
| 653 | |aChemical mechanical planarization |
|---|
| 653 | |aSlurry injection position |
|---|
| 700 | |aDewen Zhao |
|---|
| 700 | |aTongqing Wang |
|---|
| 700 | |aXinchun Lu |
|---|
| 700 | |aYongyong He |
|---|
| 773 | |tThe international journal of advanced manufacturing technology|d2013|v67|i9-12 |
|---|
| 890 | |c1 |
|---|
|
|
Không tìm thấy biểu ghi nào