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  • CallNumber: 621.3815
    Label: Microelectronic applications of chemical mechanical planarization /edited by Yuzhuo Li.
DDC 621.3815
Nhan đề Microelectronic applications of chemical mechanical planarization /edited by Yuzhuo Li.
Thông tin xuất bản Hoboken, N.J. :John Wiley,2008.
Mô tả vật lý xxv, 734 p. :ill. ;25 cm.
Thuật ngữ chủ đề Chemical mechanical planarization.
Thuật ngữ chủ đề Integrated circuits-Design and construction.
Thuật ngữ chủ đề Microelectronics-Materials.
Tác giả(bs) CN Li, Yuzhuo.
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001138496
00212
00404EAB8C5-990B-4B45-BC2C-908643645B44
005202010221115
008070412s2008 njua b 001 0 eng
0091 0
039|y20201022111514|zngavt
08200|a621.3815|222
24500|aMicroelectronic applications of chemical mechanical planarization /|cedited by Yuzhuo Li.
260 |aHoboken, N.J. :|bJohn Wiley,|c2008.
300 |axxv, 734 p. :|bill. ;|c25 cm.
504 |aIncludes bibliographical references and index.
650 0|aChemical mechanical planarization.
650 0|aIntegrated circuits|xDesign and construction.
650 0|aMicroelectronics|xMaterials.
7001 |aLi, Yuzhuo.
8561|uhttps://thuvien.ntu.edu.vn/ntukiposdata8/sachdientu/tienganh/600_khoahocungdung_congnghe/620_congnghe_hoatdonglienhe/microelectronicapplications_yuzhuoli/0page_0001thumbimage.jpg
890|c1
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