- Journal Articles
- Label: Investigation the complex dynamic evolvement mechanism
of particle cluster and surface integrity in the chemical
mechanical planarization / Xuesong Han, Yong X. Gan
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Tác giả CN
| Xuesong Han | |
Nhan đề
| Investigation the complex dynamic evolvement mechanism
of particle cluster and surface integrity in the chemical
mechanical planarization / Xuesong Han, Yong X. Gan | |
Mô tả vật lý
| From p.13-22 | |
Từ khóa tự do
| Particle cluster | |
Từ khóa tự do
| Chemical mechanical planarization | |
Từ khóa tự do
| Molecular dynamics | |
Tác giả(bs) CN
| Gan, Yong X. | |
Nguồn trích
| The international journal of advanced manufacturing technology-
Số: 1_4
Tập: 64
Năm: 2013 |
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| 00000nab#a2200000ui#4500 |
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| 001 | 113599 |
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| 002 | 21 |
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| 004 | DB459CCE-A733-4396-B745-82765191025B |
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| 005 | 201906280903 |
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| 008 | 081223s vm| vie |
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| 009 | 1 0 |
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| 039 | |y20190628090320|zluuyen |
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| 100 | |aXuesong Han |
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| 245 | |aInvestigation the complex dynamic evolvement mechanism
of particle cluster and surface integrity in the chemical
mechanical planarization / |cXuesong Han, Yong X. Gan |
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| 300 | |aFrom p.13-22 |
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| 653 | |a Particle cluster |
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| 653 | |aChemical mechanical planarization |
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| 653 | |aMolecular dynamics |
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| 700 | |a Gan, Yong X. |
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| 773 | |tThe international journal of advanced manufacturing technology|d2013|v64|i1_4 |
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| 890 | |c1 |
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