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Ký hiệu PL/XG: TK7871.85 .M379 2006
Nhan đề: Fundamentals of semiconductor manufacturing and process control / [electronic resource] /Gary S. May, Costas J. Spanos.

LCC	TK7871.85
DDC	621.3815/2
Tác giả CN	May, Gary S.
Nhan đề	Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.
Thông tin xuất bản	[Piscataway] :Hoboken, N.J. : IEEE ; : Wiley-Interscience, c2006.
Thuật ngữ chủ đề	Integrated circuits-Design and construction.
Thuật ngữ chủ đề	Process control-Statistical methods.
Thuật ngữ chủ đề	Semiconductors-Design and construction.
Môn học	Vật liệu điện
Tác giả(bs) CN	Spanos, Costas J.
Tệp tin điện tử	http://www.columbia.edu/cgi-bin/cul/resolve?clio8525385


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210	10\|aFundamentals of semiconductor manufacturing and process control
245	10\|aFundamentals of semiconductor manufacturing and process control / \|cGary S. May, Costas J. Spanos.\|h[electronic resource] /
260	\|a[Piscataway] :\|aHoboken, N.J. : \|bIEEE ; : \|bWiley-Interscience, \|cc2006.
504	\|aIncludes bibliographical references and index.
506	\|aLicense restrictions may limit access.
650	0\|aIntegrated circuits\|xDesign and construction.
650	0\|aProcess control\|xStatistical methods.
650	0\|aSemiconductors\|xDesign and construction.
690	\|aVật liệu điện
700	1 \|aSpanos, Costas J.
773	0\|tIEEE-Wiley eBooks Library
856	1\|uhttps://thuvien.ntu.edu.vn/ntukiposdata/ntulibdigitalcollections/coverimages/600_khoahocungdung_congnghe/620_congnghe_hoatdonglienhe/621_vatlyungdung/fundamentals of semiconductor manufacturing and process controlsmallthumb.jpg
856	40\|uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio8525385\|zFull text available from IEEE-Wiley eBooks Library
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910	\|aLibrary of Congress record
920	40\|uhttp://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5201952\|zFull text available from IEEE-Wiley eBooks Library
965	\|a965SerialsSolutionsBooks
999	\|aColumbia University

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